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13 septembre 2021
- handle: 10670/1.9gba55
- halshs: halshs-03515494
- doi: 10.1109/ESSCIRC53450.2021.9567877
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info:eu-repo/semantics/altIdentifier/doi/10.1109/ESSCIRC53450.2021.9567877
info:eu-repo/semantics/OpenAccess
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Eva Kempf et al., « Design and Fabrication of a Ring-Coupled Mach-Zehnder Interferometer Gyroscope », HAL-SHS : sciences de l'information, de la communication et des bibliothèques, ID : 10.1109/ESSCIRC53450.2021.9567877
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Résumé
In this paper, we present a CMOScompatible integrated photonics resonant gyroscope incorporating active Si&Ge components with low-loss SiN waveguiding structures for the first time. The gyroscope design is based on a ring-coupled Mach-Zehnder interferometer (19.2 mm ring length). Based on numerical modelling, the estimated resolution is 1.08 deg/s, representing a 1.56-times improvement over a single ring all-pass design with the same footprint. Further improvement afforded by the MZI-based design is expected under Kerr effet limited conditions. Devices were fabricated with the STMicroelectronics DAPHNE (Datacom Advanced Photonics Nanoscale Environment) 300 mm Photonic R&D platform. Experimental measurements under static (nonrotating) conditions confirm the numerical modelling results.